Status : Published

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Abstract

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

This document is not intended to cover the use of special multilayered systems such as delta doped layers.

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General information

  • Status
     : Published
    Publication date
     : 2022-11
    Stage
    : International Standard published [60.60]
  • Edition
     : 3
    Number of pages
     : 17
  • Technical Committee :
    ISO/TC 201/SC 4
    ICS :
    71.040.40 
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Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

7
Affordable and Clean Energy
9
Industry, Innovation and Infrastructure

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