ISO 18114:2003

This standard has been revised by ISO 18114:2021

Abstract

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

General information

Status
: Withdrawn

Publication date
: 2003-04

Stage
: Withdrawal of International Standard [95.99]
Edition
: 1

Number of pages
: 4
Technical Committee :
ISO/TC 201/SC 6

ICS :
71.040.40
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