Committee Draft
ISO/CD 13084
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Reference number
ISO/CD 13084
Edition 3
© ISO 2024
Committee Draft
Under development
A draft is being reviewed by the committee.
Will replace ISO 13084:2018

Abstract

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

General information

  • Status
     : Under development
    Stage
    : CD approved for registration as DIS [30.99]
  • Edition
     : 3
  • Technical Committee :
    ISO/TC 201/SC 6
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

9
Industry, Innovation and Infrastructure
3
Good Health and Well-being

Got a question?

Check out our Help and Support

  2. Store
  3. Standards catalogue
  4. ICS
  5. ISO/CD 13084