Draft
International Standard
ISO/DIS 19383
Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
Reference number
ISO/DIS 19383
Edition 1
© ISO 2025
Draft International Standard
Under development
This Draft International Standard is in the enquiry phase with ISO members.

Abstract

This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.

General information

  • Status
     : Under development
    Stage
    : DIS registered [40.00]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 107
    ICS :
    25.220.01 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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