Reference number
ISO 25178-603:2013
© ISO 2024
International Standard
ISO 25178-603:2013
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Edition 1
2013-10
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Published (Edition 1, 2013)
This publication was last reviewed and confirmed in 2018. Therefore this version remains current.

ISO 25178-603:2013

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Format
CHF 151
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Abstract

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

General information

  • Status
     : Published
    Publication date
     : 2013-10
    Stage
    : International Standard to be revised [90.92]
  • Edition
     : 1
    Number of pages
     : 28
  • Technical Committee :
    ISO/TC 213
    ICS :
    17.040.20 
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