Reference number
ISO 13095:2014
ISO 13095:2014
© ISO 2024
International Standard
ISO 13095:2014
Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
Edition 1
2014-07
2014-07
ISO 13095:2014
52800
Published
(Edition 1, 2014)
This publication was last reviewed and confirmed in 2021.
Therefore this version remains current.
Abstract
ISO 13095:2014 specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u0, where u0 is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.
General information
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Status: PublishedPublication date: 2014-07Stage: International Standard confirmed [90.93]
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Edition: 1Number of pages: 25
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Technical Committee :ISO/TC 201/SC 9ICS :71.040.40
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